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Multiwalled carbon nanotube (MWCNT) films have been deposited by using plasma enhanced chemical vapor deposition (PECVD) system onto Cr–Au patterned alumina substrates for NO2 and NH3 gas sensing applications, at operating temperature of 200°C. Nanoclusters of different MWCNT-growth catalysts (Fe and Co) have been predeposited onto substrates to promote the growth of the carbon nanotube films with different structural properties. It is demonstrated that the gas sensitivity of the MWCNT films depends on catalyst used for their growth with highest gas sensitivity achieved for Co-grown MWCNT films. The chemiresistor gas response is attributed to the p-type conductivity in semiconducting MWCNTs and the electrical charge transfer is found to be the major sensing mechanism. The results obtained demonstrate that the MWCNT-based sensors exhibit high gas sensitivity, fast response and reversibility …
American Institute of Physics
Publication date: 
5 Mar 2007

M Penza, G Cassano, R Rossi, A Rizzo, MA Signore, M Alvisi, N Lisi, E Serra, R Giorgi

Biblio References: 
Volume: 90 Issue: 10 Pages: 103101
Applied Physics Letters