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This work deals with and proposes a simple and compact diagnostic method able to characterize the interaction between microwave and plasma without the necessity of using an external diagnostic tool. The interaction between 2.45 GHz microwave and plasma, in a typical ASTeX-type reactor, is investigated from experimental and numerical view points. The experiments are performed by considering plasmas of three different gas mixtures: H2, CH4-H2 and CH4-H2-N2. The two latter are used to deposit synthetic undoped and n-doped diamond films. The experimental setup equipped with a matching network enables the measurements of very low reflected power. The reflected powers show ripples due to the mismatching between wave and plasma impedance. Specifically, the three types of plasma exhibit reflected power values related to the variation of electron-neutral collision frequency among the species by …
AIP Publishing LLC
Publication date: 
5 Dec 2016

A Massaro, L Velardi, F Taccogna, G Cicala

Biblio References: 
Volume: 6 Issue: 12 Pages: 125001
AIP advances