The knowledge of material properties like Young’s modulus and residual stress is crucial for a reliable design of devices with optimized performance. Several works discussed on the determination of the mechanical properties of thin/thick films and microstructures from deflection measurements by a profiler. This work provides an approximate solution for the load-deflection response of perforated membranes clamped on two opposite edges subjected to quasi-point pressure loads applied by a profilometer. SixNy/a-Si/SixNy thin film membranes of different sizes and porosities were fabricated by unconventional 100 °C PECVD process using surface micromachining approach. Tri-layer thin films were mechanically characterized by nanoindentation tests and residual stress measurements based on the wafer curvature method. Load-deflection measurements were done by applying quasi-point loads in the …