Fast and cheap nanofabrication process of titania (TiO 2 ) nanowires array with lateral dimensions width ranging from 90 to 180 nm and 1.4 mm in length is presented. In spite of typical pattern transfer techniques for submicron fabrication, this work focused on a 365 nm UV photolithographic process to obtain long nanowires of sol-gel nanostructured titania onto silicon oxide mesa. TiO 2 nanostrips-based array was electrically connected by sputtered platinum electrodes and tested towards different gases. A performance comparison within micromachined and solid thin film gas sensor was carried out.
22 Oct 2006
SENSORS, 2006 IEEE