Laser ion source for Ge implantation of silicon surfaces [6346-112] | Lecce UNIT

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Laser ion source for Ge implantation of silicon surfaces [6346-112]

Type:

Journal

Description:

Publisher:

International Society for Optical Engineering; 1999

Publication date:

1 Jan 2007

Authors:

F Belloni, V Nassisi, L Torrisi, J Wolowski, D Doria, A Lorusso, L Velardi

Biblio References:

Volume: 6346 Issue: 2 Pages: 634634

Origin:

PROCEEDINGS-SPIE THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING

Link:

https://scholar.google.com/scholar?cluster=3777529338814042153&hl=en&oi=scholarr