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The microstructural and morphological properties of homoepitaxial (001)ZnTe layers grown by metalorganic vapor phase epitaxy at a temperature (TG) between 325°C and 400°C are investigated by x-ray diffuse scattering. High resolution reciprocal space maps (RSMs) recorded close to the ZnTe (004) Bragg peak show different diffuse scattering features that can be ascribed to (i) the specific surface morphology of the sample, and (ii) the presence of extended lattice defects in the epilayers. One kind of cross-shaped diffuse scattering streaks, appearing for TG⩾350°C, extend along ⟨111⟩ directions and can be attributed to stacking faults (SFs) occurring at the epilayer–substrate interface, within the epilayers. The SF diameter was estimated around 200–300nm, while their density increases with TG. Another kind of cross-shaped diffuse streaks, inclined at an angle β≈80° with respect to the ⟨110⟩ in-plane …
American Institute of Physics
Publication date: 
15 Apr 2005

T Di Luccio, G Scalia, L Tapfer, P Morales, M Traversa, P Prete, N Lovergine

Biblio References: 
Volume: 97 Issue: 8 Pages: 083540
Journal of applied physics